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Senior Systems Engineer, Advanced Automation & Robotics

Onto Innovation | Wilmington, United States | Posted June 02, 2026

Position Overview

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient.

Job Summary & Responsibilities

Role summary

FEO is creating a Common EFEM (Equipment Front-End Module) platform that can be used across multiple Onto tools. We are hiring a Senior Systems Engineer to lead system-level definition and integration of the EFEM platform...

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